Open access

CMOS Force Sensor with Scanning Signal Process Circuit for Vertical Probe Card

Written By

Jung-Tang Huang, Kuo-Yu Lee and Ming-Chieh Chiu

Published: 01 December 2008

DOI: 10.5772/6615

From the Edited Volume

Sensors: Focus on Tactile Force and Stress Sensors

Edited by Jose Gerardo Rocha and Senentxu Lanceros-Mendez

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Written By

Jung-Tang Huang, Kuo-Yu Lee and Ming-Chieh Chiu

Published: 01 December 2008