Open access

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

Written By

Hidekuni Takao and Makoto Ishida

Published: 01 December 2008

DOI: 10.5772/6616

From the Edited Volume

Sensors: Focus on Tactile Force and Stress Sensors

Edited by Jose Gerardo Rocha and Senentxu Lanceros-Mendez

Chapter metrics overview

2,763 Chapter Downloads

View Full Metrics

Written By

Hidekuni Takao and Makoto Ishida

Published: 01 December 2008