Open access peer-reviewed chapter

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

Written By

Hidekuni Takao and Makoto Ishida

Published: December 1st, 2008

DOI: 10.5772/6616

From the Edited Volume

Sensors

Edited by Jose Gerardo Rocha and Senentxu Lanceros-Mendez

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Written By

Hidekuni Takao and Makoto Ishida

Published: December 1st, 2008