Open access peer-reviewed chapter

CMOS Force Sensor with Scanning Signal Process Circuit for Vertical Probe Card

By Jung-Tang Huang, Kuo-Yu Lee and Ming-Chieh Chiu

Published: December 1st 2008

DOI: 10.5772/6615

Downloaded: 2769

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Jung-Tang Huang, Kuo-Yu Lee and Ming-Chieh Chiu (December 1st 2008). CMOS Force Sensor with Scanning Signal Process Circuit for Vertical Probe Card, Sensors: Focus on Tactile Force and Stress Sensors, Jose Gerardo Rocha and Senentxu Lanceros-Mendez, IntechOpen, DOI: 10.5772/6615. Available from:

chapter statistics

2769total chapter downloads

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

By Hidekuni Takao and Makoto Ishida

Related Book

Frontiers in Guided Wave Optics and Optoelectronics

Edited by Bishnu Pal

First chapter

Frontiers in Guided Wave Optics and Optoelectronics

By Bishnu Pal

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

More about us