Open access peer-reviewed chapter

Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

By Denis Shamiryan and Dmitriy V. Likhachev

Submitted: June 7th 2011Reviewed: December 5th 2011Published: May 30th 2012

DOI: 10.5772/37758

Downloaded: 2490

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Denis Shamiryan and Dmitriy V. Likhachev (May 30th 2012). Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage, Ion Implantation, Mark Goorsky, IntechOpen, DOI: 10.5772/37758. Available from:

chapter statistics

2490total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Determination of Near-Neighbour Bonding in the Mn-Implanted GaSb Crystals

By Anna Wolska

Related Book

Frontiers in Guided Wave Optics and Optoelectronics

Edited by Bishnu Pal

First chapter

Frontiers in Guided Wave Optics and Optoelectronics

By Bishnu Pal

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

More About Us