Open access peer-reviewed chapter

Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

By Denis Shamiryan and Dmitriy V. Likhachev

Submitted: June 7th 2011Reviewed: December 5th 2011Published: May 30th 2012

DOI: 10.5772/37758

Downloaded: 2661

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Denis Shamiryan and Dmitriy V. Likhachev (May 30th 2012). Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage, Ion Implantation, Mark Goorsky, IntechOpen, DOI: 10.5772/37758. Available from:

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