Open access peer-reviewed chapter

Si Nanocrystal Arrays Created in SiO2 Matrix by High-Energy Ion Bombardment

By Irina Antonova

Submitted: April 22nd 2011Reviewed: January 17th 2012Published: May 30th 2012

DOI: 10.5772/33690

Downloaded: 1607

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Irina Antonova (May 30th 2012). Si Nanocrystal Arrays Created in SiO2 Matrix by High-Energy Ion Bombardment, Ion Implantation, Mark Goorsky, IntechOpen, DOI: 10.5772/33690. Available from:

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