Open access peer-reviewed Edited Volume

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology

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Academic Editor

Jagannathan Thirumalai
Jagannathan Thirumalai

SASTRA Deemed University, Thanjavur, India,
India

Published02 May 2018

Doi10.5772/intechopen.68234

ISBN978-1-78923-031-4

Print ISBN978-1-78923-030-7

eBook (PDF) ISBN978-1-83881-293-5

Copyright year2018

Number of pages134

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  • Dimension
  • OpenAIRE
  • AZ ebsco
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Open access  chapters

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10,616 Total Chapter Downloads

1,980 Total Chapter Views

19 Crossref Citations

15 Web of Science Citations

40 Dimensions Citations

12 Altmetric Score

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