Open access peer-reviewed Edited Volume

Advances in Unconventional Lithography

The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse as photonics and biology. Today, greater flexibility and affordability are demanded from lithography more than ever before. Diverse needs across many disciplines have produced a multitude of innovative new lithography techniques. This book, which is the final instalment in a series of three, provides a compelling overview of some of the recent advances in lithography, as recounted by the researchers themselves. Topics discussed include nanoimprinting for plasmonic biosensing, soft lithography for neurobiology and stem cell differentiation, colloidal substrates for two-tier self-assembled nanostructures, tuneable diffractive elements using photochromic polymers, and extreme-UV lithography.

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Advances in Unconventional LithographyEdited by Gorgi Kostovski

Published: November 9th 2011

DOI: 10.5772/1800

ISBN: 978-953-307-607-2

eBook (PDF) ISBN: 978-953-51-5596-6

Copyright year: 2011

Books open for chapter submissions

23830 Total Chapter Downloads

3 Crossref Citations

11 Web of Science Citations

7 Dimensions Citations


Open access peer-reviewed

1. Soft UV Nanoimprint Lithography: A Tool to Design Plasmonic Nanobiosensors

By Grégory Barbillon


Open access peer-reviewed

2. Application of Soft Lithography and Micro-Fabrication on Neurobiology

By Gao Kan, Chen Haifeng, Liu Bing-Fang and Xu Qun-Yuan


Open access peer-reviewed

3. Toward the Precise Control of Cell Differentiation Processes by Using Micro and Soft Lithography

By Yuzo Takayama, Hiroyuki Moriguchi, Kiyoshi Kotani, Takafumi Suzuki, Kunihiko Mabuchi and Yasuhiko Jimbo


Open access peer-reviewed

4. Fabrication of Surfaces with Bimodal Roughness Through Polyelectrolyte/Colloid Assembly

By Christine C. Dupont-Gillain, Cristèle J. Nonckreman, Yasmine Adriaensen and Paul G. Rouxhet


Open access peer-reviewed

5. Physical Deposition Assisted Colloidal Lithography: A Technique to Ordered Micro/Nanostructured Arrays

By Yue Li, Shuyan Gao, Guotao Duan, Naoto Koshizaki and Weiping Cai


Open access peer-reviewed

6. Design of Circular Dammann Grating: Fabrication and Analysis

By Fung Jacky Wen and Po Sheun Chung


Open access peer-reviewed

7. Fabrication of Binary Diffractive Lens on Optical Films by Electron Beam Lithography

By Atsushi Motogaito and Kazumasa Hiramatsu


Open access peer-reviewed

8. Photocontrolled Reversible Dimensional Changes of Microstructured Photochromic Polymers

By Despina Fragouli, Roberto Cingolani and Athanassia Athanassiou


Open access peer-reviewed

9. Approach to EUV Lithography Simulation

By Atsushi Sekiguchi


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI

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