The inchworm type piezoelectric actuator is one novel actuator to ensure a large working stroke with high resolution which has attracted the continuous attentions from researchers all over the world. In this study, the motion principle of the inchworm type piezoelectric is discussed: the “walker” pattern, the “pusher” pattern and hybrid “walker-pusher” pattern. The classification (linear, rotary and multi-DOF) and development are introduced in details, some significant researches are illustrated. Finally, the future direction of inchworm type piezoelectric actuators is pointed out according the development of inchworm type piezoelectric actuators. This study shows the clear principle, design and future of inchworm type piezoelectric actuators which is meaningful for the development of piezoelectric actuators.
Part of the book: Piezoelectric Actuators
Fluidic driving device plays an important role in the delivery and distribution of minute amount of the liquid in the micro-fluidic system. Due to the unique advantages of simple structure, short response time, and low power consumption, piezoelectric actuation was employed to implement the microfluidic transportation. A piezoelectrically driven microfluidic device, piezoelectric pump, was developed and widely applied in many fields in last three decades. As a kind of displacement pump, piezoelectric pumps is able to realize accurate transportation of the liquid because of per stroke of output fluid is equal to the volumetric change of pumping chamber. And the output flow rate and pressure is easily to be controlled through adjusting the driving voltage or frequency. In this chapter, the design, structure, working principle and the characterisation of piezoelectric pumps with single chamber and multiple chambers are introduced.
Part of the book: Piezoelectric Actuators