One of the most important environment monitoring problems is the detection of oxidizing gases in the ambient air. Negative impact of noxious oxidizing gases (ozone and nitrogen oxides) on human health, sensitive vegetation, and ecosystems is very serious. For this reason, palladium (II) oxide nanostructures have been employed for oxidizing gas detection. Thin and ultrathin films of palladium (II) oxide were prepared by thermal oxidation at dry oxygen of previously formed pure palladium layers on polished poly-Al2O3, SiO2/Si (100), optical quality quartz, and amorphous carbon/KCl substrates. At ozone and nitrogen dioxide detection, PdO films prepared by oxidation at T = 870 K have demonstrated good values of sensitivity, signal stability, operation speed, and reproducibility of sensor response. In comparison with other materials, palladium (II) oxide thin and ultrathin films have some advantages at gas sensor fabrication. Firstly, for oxidizing gas detection, PdO films with p-type conductivity are more perspective than the material with n-type conductivity. Secondly, at ambient conditions, palladium (II) oxide is insoluble in water and does not react with it. These facts are favorable for the fabrication of gas detectors because they make possible to minimize the air humidity influence on PdO sensor response values. Thirdly, the synthesis procedure of PdO films is rather simple and is compatible with planar processes of microelectronic industry.
Part of the book: Novel Nanomaterials