Electrodeposition is a very important technology in the fabrication of micro-components for micro-electro-mechanical systems (MEMS) or integrated circuits. Evaluations of the materials used in these devices as 3D components should be conducted using micro-sized specimens due to the sample size effect on the practical use of the components. Nanocrystalline metals could be deposited using an electrodeposition method with supercritical CO2 emulsion. Our experiment on the micro-specimens provides information on micro-mechanical testing of electrodeposited metals including the effect of sample size, grain size, and anisotropic structures on mechanical properties. In this chapter, recent studies on crystal growth in electrodeposition of metals and its evaluation using micron-sized testing will be presented.
Part of the book: Electroplating of Nanostructures