Open access

The Wafer Alignment Algorithm Regardless of Rotational Center

Written By

HyungTae Kim, HaeJeong Yang and SungChul Kim

Published: 01 May 2008

DOI: 10.5772/5406

From the Edited Volume

New Approaches in Automation and Robotics

Edited by Harald Aschemann

Chapter metrics overview

3,482 Chapter Downloads

View Full Metrics

Written By

HyungTae Kim, HaeJeong Yang and SungChul Kim

Published: 01 May 2008