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Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering

Written By

Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny

Published: 01 December 2009

DOI: 10.5772/7013

From the Edited Volume

Micro Electronic and Mechanical Systems

Edited by Kenichi Takahata

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Written By

Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny

Published: 01 December 2009