Open access peer-reviewed chapter

One-Dimensional Models for Diffusion and Segregation of Boron and Ion Implantation of Aluminum in 4H-Silicon Carbide

Written By

Kazuhiro Mochizuki

Submitted: May 26th, 2010 Reviewed: September 9th, 2010 Published: April 4th, 2011

DOI: 10.5772/14553

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Written By

Kazuhiro Mochizuki

Submitted: May 26th, 2010 Reviewed: September 9th, 2010 Published: April 4th, 2011