Open access

Low Temperature Chemical Vapour Deposition of Polycrystalline Silicon Carbide Film Using Monomethylsilane Gas

Written By

Hitoshi Habuka

Submitted: May 27th, 2010 Published: April 4th, 2011

DOI: 10.5772/14635

Chapter metrics overview

4,169 Chapter Downloads

View Full Metrics

Written By

Hitoshi Habuka

Submitted: May 27th, 2010 Published: April 4th, 2011