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Growth Rate Enhancement of Silicon-Carbide Oxidation in Thin Oxide Regime

Written By

Yasuto Hijikata, Hiroyuki Yaguchi and Sadafumi Yoshida

Submitted: 26 May 2010 Published: 04 April 2011

DOI: 10.5772/14591

From the Edited Volume

Properties and Applications of Silicon Carbide

Edited by Rosario Gerhardt

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Written By

Yasuto Hijikata, Hiroyuki Yaguchi and Sadafumi Yoshida

Submitted: 26 May 2010 Published: 04 April 2011