Open access peer-reviewed chapter

Growth Rate Enhancement of Silicon-Carbide Oxidation in Thin Oxide Regime

Written By

Yasuto Hijikata, Hiroyuki Yaguchi and Sadafumi Yoshida

Submitted: May 26th, 2010 Reviewed: September 24th, 2010 Published: April 4th, 2011

DOI: 10.5772/14591

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Written By

Yasuto Hijikata, Hiroyuki Yaguchi and Sadafumi Yoshida

Submitted: May 26th, 2010 Reviewed: September 24th, 2010 Published: April 4th, 2011