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Ultra-Fast Microwave Heating for Large Bandgap Semiconductor Processing

Written By

Mulpuri V. Rao

Submitted: 25 June 2010 Published: 14 February 2011

DOI: 10.5772/16036

From the Edited Volume

Advances in Induction and Microwave Heating of Mineral and Organic Materials

Edited by Stanisław Grundas

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Written By

Mulpuri V. Rao

Submitted: 25 June 2010 Published: 14 February 2011