Open access peer-reviewed chapter

Liquid Encapsulation Technology for Microelectromechanical Systems

By Norihisa Miki

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Published: May 29th 2013

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Norihisa Miki (May 29th 2013). Liquid Encapsulation Technology for Microelectromechanical Systems, Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies Kenichi Takahata, IntechOpen, DOI: 10.5772/55514. Available from:

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