1 Open Access Books

81 Authors and Editors

118 Web of Science Citations

55 Crossref Citations

115 Dimension Citations

Inside the subject

1 peer-reviewed open access book

Top 5 Most cited chapters in this subject

Open Access Peer-reviewed Chapters

Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of the book: Lithography

16,978
19
High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of the book: Lithography

8,575
3
Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of the book: Lithography

4,618
1
Nano-Crystalline Diamond Films for X-ray Lithography Mask

By Linjun Wang, Jian Huang, Ke Tang and Yiben Xia

Part of the book: Lithography

2,787
2
Influence of Immersion Lithography on Wafer Edge Defectivity

By K. Jami, I. Pollentier, S. Vedula and G. Blumenstock

Part of the book: Lithography

6,425
2

Top 5 Most downloaded chapters in this subject in the last 30 days

Open Access Peer-reviewed Chapters

Nanoimprint Lithography

By Hongbo Lan and Yucheng Ding

Part of the book: Lithography

16,972
19
Nanoimprint Lithography

By Thomas Glinsner and Gerald Kreindl

Part of the book: Lithography

5,390
4
High-energy Electron Beam Lithography for Nanoscale Fabrication

By Cen Shawn Wu, Yoshiyuki Makiuchi and ChiiDong Chen

Part of the book: Lithography

8,572
3
Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

By Maan M. Alkaisi and Khairudin Mohamed

Part of the book: Lithography

4,617
1