Part of the book: Lithography
We demonstrate extreme ultraviolet (EUV) and soft x-ray sources in the 2- to 7 -nm spectral region related to the beyond extreme ultraviolet (BEUV) question at 6.x nm and a water window source based on laser-produced high-Z plasmas. Strong emissions from multiply charged ions merge to produce intense unresolved transition array (UTA) toward extending below the carbon K-edge (4.37 nm). An outline of a microscope design for single-shot live- cell imaging is proposed based on a high-Z UTA plasma source, coupled to x-ray optics. We will discuss the progress and Z-scaling of UTA emission spectra to achieve lab-scale table-top, efficient, high-brightness high-Z plasma EUV-soft x-ray sources for in vivo bio-imaging applications.
Part of the book: Plasma Science and Technology