Open access peer-reviewed chapter

Wet Thermal Oxidation of GaAs and GaN

By Ryszard Korbutowicz and Joanna Prazmowska

Published: April 1st 2010

DOI: 10.5772/8555

Downloaded: 4812

© 2010 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution-NonCommercial-ShareAlike-3.0 License, which permits use, distribution and reproduction for non-commercial purposes, provided the original is properly cited and derivative works building on this content are distributed under the same license.

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Ryszard Korbutowicz and Joanna Prazmowska (April 1st 2010). Wet Thermal Oxidation of GaAs and GaN, Semiconductor Technologies, Jan Grym, IntechOpen, DOI: 10.5772/8555. Available from:

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