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Wet Thermal Oxidation of GaAs and GaN

Written By

Ryszard Korbutowicz and Joanna Prazmowska

Published: 01 April 2010

DOI: 10.5772/8555

From the Edited Volume

Semiconductor Technologies

Edited by Jan Grym

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Written By

Ryszard Korbutowicz and Joanna Prazmowska

Published: 01 April 2010