Open access peer-reviewed chapter

Thin Films Processed by SILAR Method

Written By

Md Abdul Majed Patwary

Submitted: 11 June 2022 Reviewed: 11 July 2022 Published: 22 December 2022

DOI: 10.5772/intechopen.106476

From the Edited Volume

Thin Films - Deposition Methods and Applications

Edited by Dongfang Yang

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Abstract

SILAR is one of the simplest techniques in terms of the better flexibility of the substrate choice, capability of large-area fabrication, deposition of stable and adherent film, low processing temperature for the film fabrication as well as reproducibility. This technique is very budget friendly since it does not require any sophisticated equipment. Moreover, various fabrication parameters such as solution concentration, precursors, the number of cycles during immersion, pH, annealing, doping, and growth temperature affect the rate of fabrication as well as the structural, optical, and electrical properties of the fabricated thin films led the technique unique to study in an extensive manner. A chapter regarding different aspects of semiconductors-based optoelectronics by SILAR has yet to be published. This chapter will concern the recent progress that has recently been made in different aspects of materials processed by the SILAR. It will describe the theory, mechanism, and factors affecting SILAR deposition as well as recent advancements in the field. Finally, conclusions and perspectives concerning the use of materials in optoelectronic devices will be represented.

Keywords

  • SILAR
  • thin films
  • supercapacitors
  • photovoltaics
  • water splitting

1. Introduction

The successive ionic layer adsorption and reaction (SILAR) technique was first introduced in 1985 by Nicolau for the deposition of ZnS and CdS [1], and Ristov et al. for the deposition of Cu2O thin films [2]. Nicolau applied the adsorption technique of film preparation, relating two sources—a metal source of aqueous solutions of CdSO4 or ZnSO4, and a sulfide source of Na2S, maintaining ambient temperature. The substrate was dipped in each of the solutions following consecutive cycles, applying rinsing steps in between to eliminate excessive precursors. In the case of Ristov et al., the method was employed using clean glass substrates, which were sequentially immersed into a solution of NaOH and a Cu-complex such as [Cu(S2O3)] to prepare Cu2O thin films. The complex [Cu(S2O3)] was well-maintained at ambient temperature, while the NaOH solution was kept at a temperature range from 60 to 80°C. The outstanding structural, electronic, and optical properties of the thin films produced in the two investigations stimulated the persistence of the practices. Hence, the technique was functional to the fabrication of a large variety of thin film semiconductors till to date [3, 4, 5]. Consequently, SILAR appeals huge scientific attention and has been well known as a facile technique for the fabrication of thin films of metal oxides, sulfides, selenides, peroxides, and hydroxides, as well as more complex hetero-structured thin films [6, 7, 8, 9, 10, 11]. Compared with the other popular deposition techniques, SILAR is unique due to multiple reasons [3, 12, 13, 14] as mentioned below:

  1. The thin film is generally fabricated on a simply cleaned and rigid planar substrate having no dimensional limits. There is no restriction on the surface of the coating materials, so films can be fabricated on temperature-sensitive substrates like plastics. Even oxidation or corrosion of metal backing substrates can be used to deposit films by choosing suitable precursors.

  2. The deposition rates and film thickness can be well controlled by monitoring reactant precursors, which are generally the desired cationic and anionic salts dissolved in solvents, while the anticipated stoichiometry can be attained through changing their type, concentration, or other involved dipping parameters.

  3. By controlling the number of deposition cycles and concentration of species, the thicknesses of the thin films can be simply tuned over a wide range such as from nm scale to μm.

  4. SILAR fabrications are very convenient and energy efficient as the technique is mostly controlled at room or low temperature. If required, the as-deposited coating materials can be annealed post-deposition to activate grain growth, crystallization, etc.

  5. Besides, the fabricated thin films can be reformed to show preferential crystallographic orientation as well as grain assembly due to the controllability of ionic reactions performed at the substrate solution interface.

  6. The SILAR method supports film development only on the surface of the substrate that is immersed into the solution, hence diminishing unnecessary consumption of the used reactants. If required, precursor solutions could also be reloaded and reprocessed.

Therefore, SILAR is a vastly multipurpose and influential process for the fabrication of numerous thin film materials having huge technological attention and, hence, unlocked a wide window in optoelectronic device applications.

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2. Theory and process mechanism

SILAR is widely used, simple technique to fabricate high-quality thin films [3, 15]. During deposition, successive ionic layer adsorption and reaction of the ions take place at the solid-solution interface of the substrate. Thus, the thin film of the compound, ApBy is deposited on to the substrate surface by dint of the adsorbed cations, xAy+ and anions, qBp− due to the following heterogeneous chemical reactions:

AxQysxAy+aq+yQxaqE1
PpBqspPq+aq+qBpaqE2
Ay+aq+BpaqApBysE3

where x, y, p, q and y+, q+, x, p are the number and charges of the corresponding ions A (metal ions), P (cationic precursor), Q (anionic precursor), and B (anions) respectively [2, 16]. Sometimes, the ligands Ln are a necessity to complete the reaction [17, 18, 19, 20]. The solution having the first element containing the final target material can be thought as the compound AxQy fully dissociated in the chosen solvent such as in water (Reaction 3). Usually, AxQy is a metal salt where Ay+ represents cations such as Zn2+, Cu2+, Mn2+, Cd2+, Bi3+, and Bp represents anions such as NO3−, Cl, SO42−.

Hence, a basic SILAR cycle comprises four different steps, correlating alternate immersion of the substrate into cationic and anionic precursor solution followed by rinsing in every immersion cycle to eliminate loosely adhered particles as shown in Figure 1 and described below:

Figure 1.

Representation of different steps during a SILAR cycle.

2.1 Adsorption

First step of the SILAR process is the formation of the Helmholtz double layer, which is due to the initial adsorption of cationic precursor, xAy+, on the surface of the substrate. This layer is generally composed of two charged layers, the positively charged inner layer and negatively charged outer layers. The positive (+ve) layer consists of the cations, xAy+, while the negative (−ve) layer, yQx, is the counter ions of the cations.

2.2 Rinsing I

In the second step, excessive adsorbed ions, xAy+ and yQx, are rinsed away from the diffusion layer toward the bulk solution and a hypothetical monolayer is formed. This results in a saturated electrical double layer showing an ideal scenario of the process.

2.3 Reaction

In the reaction stage, the anions, qBp, from anionic precursor solution are introduced into the system. A solid substance, ApBy, is formed on the interface due to the low stability of the material. This process employs the reaction of xAy + surface species with the anionic precursor, qBp.

2.4 Rinsing II

In the final step of a SILAR cycle, the excess and unreacted species (yQx, pPq+) and the reaction by product from the diffusion layer are removed leaving expected films.

A schematic presentation of a single cycle for the fabrication of Cu2SnS3 film is shown in Figure 2 [21]. In the case of Cu2SnS3 film fabrication, ion-by-ion type of deposition takes place through nucleation spots of the adsorbed surfaces [22]. Nucleation occurs due to the surface condensation of the ions and outcomes of, that is, an dense adherent thin film [23]. The substrate was firstly dipped into the cationic precursor containing mixed CuCl2 and SnCl2 solutions, where Cu2+ and Sn2+ species were available. Sn2+ ion in solution is good reducing agents, and thus, Cu2+ reduces to Cu+ and Sn2+ is oxidized to Sn4+ in cationic solution as shown by the following reaction:

Figure 2.

Schematic representation of Cu2SnS3 thin film fabrication by SILAR technique [21].

2CuCl2+SnCl2+6H2O=2Cu++Sn4++6HCl+6OHE4

The substrate was then rinsed off with DI H2O to eliminate the loosely bounded reactants. Then, it was dipped into an anionic precursor containing Na2S.xH2O solution, which gave sulfide ions (S2−) to react with the cations Cu+ and Sn4+. Finally, the reaction occurred between the pre-adsorbed Cu+, Sn4+ cations, and the S2−anion to form a solid Cu2SnS3 thin film as,

Na2S+H2O2Na++HS+OHE5
HS+H2OH3O++S2E6
2Cu++Sn4++3S2Cu2SnS3E7

In the last step of the process, the substrate was again dipped into the DI H2O to remove the unwanted excessive particles to provide a uniform surface containing Cu2SnS3 thin film.

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3. SILAR-facilitated material deposition: A summary

The deposition of the series of chalcogenide mainly metal oxides, sulfides, selenides, and tellurides films has been always on numerous attentions in the advancement of the SILAR since its launch. Currently, SILAR has become a broadly functional technique in the deposition of a huge variety of semiconductor thin films. For the simplicity of discussion, we have summarized most of the metals still synthesized as metal compounds by SILAR in Table 1.

OxidesSulfidesSelenidesTellurides
Mg, Ti, V, Mn, Fe, Ni, Cu, Zn, Mo, Ag, Cd, W, Bi, SnCu, Zn, Cd, Ni, Sn, Pd, Mo, Ag, As, Bi, Mn, Sb, Fe, LaCu, Sb, Cd, BiCu, Cd, La

Table 1.

List of the metals still grown by SILAR technique.

A list of materials deposited using SILAR technique with their growth conditions with the required raw materials for the growth is summarized in Table 2. For the simplicity, the discussion is divided into four parts as of Table 1, as specified below:

MaterialPrecursorspH
(C, A)
Temperature, 0CCyclesRinsingDipping time, s (C, A)Refs.
CationicAnionicGrowthAnneal
OXIDES
Cu2OCu(S2O3)NaOH7010, 15, 20, 25, 30No5, 5[24]
CuOCuSO4NH4OHC:108010, 20, 30, 40H2O10, 15[25]
ZnOZnSO4NH4OH100200100No2, 2[26]
TiO2TiCl3NaOHC: 3400100, 150H2O20, 10[27]
CdOCdCl3NH4OHC:129040060, 70, 80, 90, 100, 110H2O10, 20[28]
FexOyFeCl3NaOH400120H2O10, 10[29]
Mn3O4Mn2SO4NaOH6050H2O10, 10[30]
NiONi (NH3)4H2O90200, 300, 400100H2O30, 7[31]
WO3H2O4WNaOH8040025, 50, 75, 100, 125H2O20, 10[32]
Bi2O3Bi(NO3)2+ N(CH₂CH₃)₃H2O7080H2O10, 10[33]
MgOMg(NO3)2NH4OHA:11.590400No30, 30[34]
Cu2V2O70.025 M Cu(NO3)20.025 M NH4VO3755, 10, 20, 30, 60, 70, 80, 100No20, 20[35]
Ag3VO4AgNO3Na3VO470100 ∼ 3505, 10, 15, 20H2O20, 20[36]
BiVO4Bi(NO3)3NH4VO3754505, 10, 20, 30H2O20, 20[37]
Fe2V4O13Fe(NO3)3NH4VO375400, 50020H2O20, 20[38]
ZnFe2O4ZnCl2, FeCl2Aq. NH3550H2O30, 30[39]
BiOIBi(NO3)3KI5, 15, 30, 45H2O10, 10[40]
NiMoO4NiCl2 + NH4OHNa2MoO4C:12.27030030H2O20, 20[41]
FePO4FeCl3NaH2PO425H2O10, 10[42]
SULFIDES
CuSCuCl2Na2SC: 3, A:12RT200, 300, 40040H2O30, 30[43]
Ag2S/Ag2S3AgNO3Na2S.xH2O5512CH3OH30, 45[44]
Ag2SAgNO3SC(NH2)2C:8, A:630DD, H2O12, 10[45]
ZnSZnCl2Na2SC:5, A:12RT200, 300, 40040H2O20, 20[43]
CdSCd(NO3)2Na2S9,12,15,18H2O60, 60[46]
NiSNiSO4Na2SC:8, A:10RT150H2O60, 60[47]
SnSSnCl2Na2SC:1.8, A:9.57H2O20, 20[48]
PbSPb(NO3)2Na2S10, 30, 50CH3OH60, 60[49]
MoS2(NH4)6Mo7O2Na2SC: 3, A:13.527100H2O25, 25[50]
As2S3As2O3 + EDTANa2S2O3C: 1, A: 68010, 15, 20, 25, 30, 35, 40, 45, 50DI H2O15, 15[51]
Bi2S3Bi(NO3)3Na2S75200302-CH3OC2H5 & CH3OH15, 15[52]
MnSMnCl2Na2SC:5.5, A:12RT60, 80, 100, 120, 140H2O30, 30[53]
Sb2S3SbCl3Na2S2O35025, 30, 33H2O20, 20[54]
FeSFeSO4Na2S2740H2O[55]
FexSxFe(NO3)2Na2S2720020H2O30, 30[56]
CoSCoSO4Na2SC:8–10 A: 122725H2O50, 50[57]
La2S3La2O3Na2S2O32 ± 0.1RT30090H2O30, 30[58]
SELENIDES
Cu3Se2CuSO4Na2SeSO3C:2RT30060H2O20, 20[59]
Sb2Se3SbCl3Se2−RT8010C2H5OH[60]
CdSeCdCl2. H2ONa2SeSO3C: 8, A:11.3RT30, 40, 50 60H2O60, 60[61]
Bi2Se3Bi(NO3)3 + N(CH2CH2OH)3Na2SeSO3C: 8, A: 8.527150H2O30, 30[62]
Sb2Se3K(SbO)C4H4O6Na2SeSO3C:3, A:8.527350H2O40, 40[62]
TELLURIDES
CdTeCd(CH3CO2)2Na2TeO3C: 5, A: 1127910H2O30, 30[63]
Cu2TeCuSO4Na2TeO3C:5, A: 92760H2O20, 20[64]
La2Te3LaCl3+ CH3COOHTe pow. + HCl + HNO3C:2, A:1RT180H2O20, 20[65]

Table 2.

A list of materials deposited using SILAR technique with their growth conditions. (C, a: Cationic, anionic).

3.1 Metal oxides

An increasing number of oxide materials deposited by SILAR have demonstrated high chemical, thermal, and expected stability that is one of the reasons to increase the popularity of oxide synthesis by SILAR. However, the technique of oxide synthesis is somehow difficult compared to sulfides, selenides, and tellurides due to the unavailability of the anionic precursors, which is the direct source of O2− to form oxides. For example, in case of the synthesis of most of the binary metal oxides, H2O, NaOH, and NH4OH are used as anionic precursors with a mild thermal treatment of around (70 ∼ 90) 0C to activate the precipitation of hydroxides. On the other hand, the most common cationic precursors are mainly of metal thiosulfates, sulfates, chlorides, nitrates, etc., to provide metal ion adsorption on the substrate surface. Until today, CuxO, ZnO, TiO2, and CdO are the most examined materials by SILAR. The investigation of Mn3O4, NiO, and Bi2O3 is also increasing [31, 32, 33, 34]. Recently, both nanostructured Fe2O3 and Fe3O4 have been fabricated applying sulfate and chloride salts using NaOH as the anionic precursor via SILAR [30, 66]. But research on WO3 [32], MgO [34], and SnO [67] fabrication is still rare. In case of ternary metal oxides, the SILAR deposition has been widely increased due to their ability to the additional modulate characteristics by controlling the composition of the materials. The synthesis of CST is discussed in the theory and mechanism section, which can be again done by two ways—a combined solution of both the deposited metal cations or, an alternating (one by one) fabrication of the two cations. A good technique to produce ternary metal oxides with excessive control on stoichiometry is to react one of the two metal ions by its own oxyanion. For example, Bi(NO3)3 and NH4VO3 react to fabricate BiVO4 [37], as ammonium vanadates are extremely soluble in water, while the anticipated metal vanadates are not. Consequently, they precipitate out of solution as the expected phase on the substrate surface. The other oxides such as Ag3VO4 [36], BiVO4 [37, 68], Cu2V2O7 [35], and Fe2V4O13 [38] follow similar trends. Though bismuth oxyhalides, for instance, BiOI [69, 70] is not a pure oxide but have been synthesized by the SILAR using cationic precursor of bismuth nitrate and anionic precursor of KI [71].

3.2 Metal sulfides

The characteristic easiness of the procedure and wide-ranging obtainability of the anionic precursors afford metal sulfides the most fabricated materials by employing SILAR technique. The easiest way of sulfide thin film deposition is to use metal salts as cationic precursors and H2O-soluble sodium sulfides or thiosulfates as anionic precursors. For example, NiS thin films could be fabricated using NiSO4 (pH: 8) as cationic precursors and Na2S (pH: 10) as anionic precursors even at room temperature [47]. Generally, the solubility product constants of used sulfide materials in water are higher than 10−20, for instance, CuS: ≈10−36 and CdS: ≈10−27, which is the key force of the deposition of the expected metal sulfides. Among the sulfides, CuS [72], ZnS [43, 73], CdS [46], Ag2S [44, 45], SnS [48], and PbS [49] have been broadly investigated mostly depending on the usage of chlorides and nitrates as the metal precursors and Na2S as anionic precursors for the S2− source. Moreover, the investigation on NiS [47], Bi2S3 [52] and MoS2 [13, 50], As2S3 [13, 51], MnS [53] are growing fast, while in the case of CoS [57], La2S3 [58] studies are still infrequent. Moreover, core@shell-like SnS2@Co3S4, ternary (NiCo2S4), and quaternary (Cu2BaSnS4) films as well as nanocomposites of CdS and Bi2S3 have been reported with their potential applications.

3.3 Metal selenides

In most of the cases, SILAR fabrication of the metal selenides has been directed through a solution of chloride, nitrate, or sulfate functioned as cationic precursor consisting of the anticipated metal, and a solution of Na2SeSO3 worked as the anionic precursor consisting of the source of Se2− to form selenides. For example, 0.2 M CdCl2. H2O (pH: 8) reacts with 0.1 M Na2SeSO3 (pH: 11.3) to fabricate CdSe thin film [61]. Based on requirements, sometimes NaHSe, ethanolic NaBH4, or Na2Se can also be used as an anionic precursor to fabricate metal selenides. The SILAR deposition of Cu3Se2, Sb2Se3, Bi2Se3, and CdSe were studied and investigated mainly at room temperature avoiding thermal treatment during the sample growth, which was always maintained at (70–90) 0C in the traditional cases.

3.4 Metal tellurides

The minimum studied materials among the chalcogen members via SILAR technique are metal tellurides because of the unavailability of the appropriate anionic precursors. Na2TeO3 or ethanolic Te or TeO2 with NaBH4 is the mostly used anionic precursor performed as the source of Te2− to form tellurides. For example, 0.1 M CuSO4. 5H2O (pH: 5) and 0.05 M Na2TeO3 (pH: 9) react at an ambient temperature to synthesize Cu2Te film. Till now, CdTe, Cu2Te, La2Te3, Cu7Te4, and Bi2Te3 thin films were fabricated and investigated via SILAR technique having potential uses in case of radiation detectors, photovoltaics, and thermo-electric devices [63, 64, 65]. More scientific research is expected to understand and control the characteristics of such fabricated films to build outstanding optoelectronic devices.

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4. Recent advances by SILAR

The optoelectronic properties of SILAR grown thin films have been demonstrated in many more applications, for example, supercapacitors, photovoltaics, photoelectrochemical water splitting, gas sensors, and many more. The technique seems to be simpler and represents an efficient way to fabricate devices. Three potential applications such as supercapacitors, photovoltaics, and photoelectrochemical water splitting will be discussed in the following section.

4.1 Supercapacitors

The rapid progress in state-of-the-art tools has guided to a profound reliance on energy storage devices. Satellites, electric vehicles, laptops, cellphones, and sensors need some species of energy storage to function properly. The lead-acid battery was the first device, discovered around the 1800s, and most common storage energy till today. Supercapacitors, another promising energy storage device, well known as electrochemical capacitor or ultracapacitor creates a gap bridging role between conventional capacitors and batteries [74]. They can offer 1 ∼ 2 orders of higher magnitude of power density than rechargeable batteries as well as supply much more energy than traditional dielectric capacitors.

A supercapacitor works following two-charge storage mechanisms: (i) surface ion adsorption such as electric double-layer capacitance (EDLC) and (ii) redox reactions such as pseudo capacitance. Supercapacitors reveal an extraordinary set of features in comparison with batteries, for instance, high-power density, low maintenance cost, reliable cycling life, fast rates of charge or discharge, and safe operation as well as offer versatile powering solutions to many appeals ranging from portable consumer electronic appliance and electric automobiles to large-scale smart utility grids. Nevertheless, carbon-based EDLC supercapacitors show very low energy densities, which are limited through the finite electrical charge separation at the interface of electrolyte and electrode materials, as well as the approachability of surface area. Consequently, efforts to surge the energy densities of supercapacitors have involved the application of better pseudo-capacitance electrode supplies, equipped by conducting polymers and nanostructured metal oxides, bearing the low cost of high-power density as well as chemical stability, which have the significance of phase changes and faradaic reactions in it [74].

Several types of metal oxides, sulfides, and tellurides have been used in supercapacitor device fabrication so far, by utilizing the ever-fast-growing technique SILAR as summarized in Tables 3 and 4. Initially the single metal oxides or sulfides such as CuO, NiO, NiMoO4, WO3, Bi2O3, Mn3O4, or MnS have been prepared by following SILAR technique and then tested for the supercapacitor behaviors to acquire the results of specific capacitance with their retention stability using cyclic voltammetry (CV) with the assistance of 3-electrode measurement system. Higher capacitance was attained at the lower scan rate and/or lower current density during such measurements and usually a relatively small quantity of electrochemical active material was developed atop of the working electrode. Moreover, the performance found using the 3-electrode system is higher than 2-electrode test cells, and the latter can be either a symmetric (S) or asymmetric (A) cell. Generally, in a symmetric cell both positive and negative electrodes are alike, whereas they are different active materials in an asymmetric cell.

ElectrodeScan voltage (V)ElectrolyteSpecific capacitance, Fg−1Current densityCapacitance retentionRef
MnO2−0.1 to +0.91 M Na2SO43145 mVs−190%10,000[75]
Mn3O4−0.2 to +1.21 M Na2SO4786.25 mVs−171%1000[76]
MnS−0.15 to +0.556 M KOH8285 mVs−185%5000[77]
NiO−1.0 to +0.451 M KOH13412 mVs−190%1000[78]
CuO−0.3 to +0.51 M Na2SO34761 mAcm−289%1500[79]
CuO−0.8 to +0.41 M Na2SO45541 Ag−192%4000[25]
Bi2O3−0.8 to +0.31 M Na2SO4329.65 mVs−172%3000[33]
WO3−0.7 to +0.41 M Na2SO426610 mVs−181%1000[32]
Fe2O3−0.6 to +0.11 M NaOH1785 mVs−1[24]
Fe3O4−1.4 to −0.31 M KOH4881 mAcm−1[29]
NiCo2O4−0.1 to +0.53 M KOH19365 mVs−195%1000[80]
NiMoO4−0.1 to +0.42 M KOH11801 Ag−127%1000[81]
NiMoO4−0.6 to +0.62 M KOH18531 Ag−165%2500[41]
SnO2-RuO2−0.2 to +0.60.5 M H2SO410101 mAcm−285%2500[82]
SnS2@Co3S40 to +4.515801 mVs−195%3000[83]
NiO/MWCNTs−0.1 to +0.52 M KOH17275 mAcm−291%2000[84]
Ni-Co-Ox/C-black−0.2 to +0.41 M KOH18110.5 mAcm−292%8000[85]
Bi2S3: PbS/MWCNTs−0.1 to +0.70.5 M Na2SO4864.22 mVs−168%4000[86]

Table 3.

Properties of various electrode materials deposited by SILAR for electrochemical capacitors by 3-electrode system.

ElectrodeS/AScan VoltageElectrolytePower densityEnergy densityCapacitanceRef
Materials(V)(WKg−1)(WhKg−1)retention
MnO2S−0.1 to +0.91 M Na2SO411004.2Stable10,000[30]
La2S3S−1.2 to 01 M Na2SO412603578%1000[58]
La2Te3S−1.2 to 01 M LiClO4/PC72206082%1000[65]
ZnCo2O4S0 to 1PVA-KOH14519.769%2000[87]
ZnFe2O4S0 to 1PVA-LiClO42774.566%1000[88]
ZnFe2O4A0 to 1.66 M KOH79702874%3000[39]
Bi2S3: PbS/MWCNTsS0.6 to 1.20.5 M Na2SO483013.3668%4000[86]
MnS@NF/rGO@NFA0 to 1.6PVA–KOH128034.187%2000[77]
Y-doped Sr.(OH)2S0 to 1.5PVA-Na2SO422703.761%1000[89]
In: WO3/Cu7Te4/Bi2Te3S0 to 1Polysulfide170018.85[90]

Table 4.

Supercapacitors performance of SILAR grown films measured by 2-electrode system.

Not only binary, but also ternary or even doped metal oxides, sulfides or tellurides were synthesized via SILAR for supercapacitor device application. For example, ZnCo2O4 and ZnFe2O4 were synthesized via SILAR technique from binary cationic solutions in the presence of Zn and Co (or Fe) precursors and demonstrate high energy density of 9.67 and 28 Wh kg−1 as well as power density of 1451 and 7970 W kg−1, respectively. La2S3 and La2Te3 with mesoporous pine-leaf structure prepared with SILAR showed 35 and 60 WhKg−1 energy density and power density of 1260 and 7220 WKg−1, respectively. A flexible La2Te3│LiClO4-PVA│La2Te3 supercapacitor cell was further fabricated and is represented as in Figure 3.

Figure 3.

Schematic diagrams of La2Te3│LiClO4-PVA│La2Te3 supercapacitor device [65].

Hybrid supercapacitors, EDLC and pseudo-capacitance, build of charge storage mechanisms reduce the superior features of the device. On the other hand, among the other EDLC electrode materials multiwalled carbon nanotubes (MWCNTs) fascinated major interest due to their favorable features such as high surface area and mesoporous network, good mechanical strength and flexibility, excellent electrical conductivity, and chemical stability. The facile synthesis of composites of metal oxides with carbon materials was facilitated by SILAR as well. For instance, the fabrication of NiO/MWCNTs nanohybrid thin films via SILAR and the specific capacitance was as high as 1727 Fg−1 and current density 5 mAcm−2 with 91% retention ability after 2000 cycles as demonstrated in the Figure 4 [84]. Moreover, an analogous synthesis style was employed to NiCoOx/Carbon-black hybrid thin films accomplishing coatings with a high specific capacitance of 1811 Fg−1 at 0.5 mAcm−2 [85].

Figure 4.

Assembly of highly flexible symmetric NiO/MWCNTs-NiO/MWCNTs nanohybrid device: (a) image of flexible NiO/MWCNTs thin film deposited on the stainless steel, (b) NiO/MWCNTs nanohybrid thin film electrodes with closed ends (2 × 3 cm2 area), (c) coating of the electrode by PVA/LiClO4 gel electrolyte, (d) flexible supercapacitor built under the ∼1 ton pressure through sandwiching the two-gel electrolyte coated electrodes, (e) two flexible supercapacitors in series can successfully light a LED [84].

Therefore, SILAR is a unique as well as multipurpose technique to fabricate thin films for supercapacitor device application with superior power and energy densities in comparison with other available and more conventional deposition techniques, justifying the quality of the SILAR growth thin films.

4.2. Solar cells

Photovoltaic (PV) is a simple device, which promotes the direct conversion of light radiation into electrical energy by following the photovoltaic effect [91]. The discovery of such a device for the conversion of sunlight radiation directly into electricity was first carried out during the late 1800s. C. Fritts first demonstrated the solid-state PV by fabricating a thin layer of Au on Se semiconductor material [92]. At American Telephone and Telegraph Bell Laboratory the modern PV was discovered by Ohl in 1946 [93] but demonstrated by Chapin, Fuller and Pearson in 1954 [94]. The cell was fabricated by single-crystal Si wafer having an efficiency of ∼5%.

At present for feasible use, extensive research is going for efficiency enhancement of solar cells, as the efficiency of solar cells is one of the very vibrant parameters to promote this technology. Over the years, the efficiency of single crystal-Si solar cells has shown a sound development. In 1950s, it was only 15% and nowadays it is improved to around 26.7% [95]. The commercial efficiency of Si solar cell is approaching in between 12% and 15%, while the theoretical Shockley-Queisser (SQ) limit energy conversion efficiency is of around 28% [96]. The PV cell and module market was mostly occupied on first-generation Si-based cells until 2004, for example, sc- and poly-Si cells, which covered about 85% of the overall international PV modules market. In the meantime, thin film cells or second-generation PV have exhibited great advantages, for instance, the ease of large area fabrication and usage of minimum materials, though their market share was much smaller in comparison with the Si-cells [97]. After 2005, the developments were spurred by the sharp increase in the country’s implementation of solar energy due to the rapid advancement of the PV production industry in China. The price of PVs is generally supplemented by the strict requirement for fabricating high-purity materials such as GaAs and Si, or the rare-earth elements such as CIGS. The element, In, is rare and can be certainly exhausted, which might affect the prospect of such PVs. Later, CdTe thin-film PVs have increased longing in the market of South-Eastern countries. But Cd has a serious environmental distress, which is due to its high toxicity [98, 99]. For example, chronic Cd exposure breeds an extensive acute and chronic effects in humans [100, 101]. Moreover, Cd is a rare earth element and it will also generate a higher cost within the demand in future. Further, a third generation of devices has newly developed in addition to the thin-film solar cells, based on fresh organic materials such as dye-sensitized solar cells (DSSC) [102], quantum dot solar cells (QDSC), perovskites, bulk heterojunctions, having innovative device architectures with the usage of multiple exciton generation, upconverting layers, and others. Though, organic materials-built PVs have small life spans as the nature of the materials, for example, thermal stability [103] or concerns of electrolyte-based variability [104]. Inherently, a mostly striking new field of PV devices using metal oxide (MO) semiconductors has performed [105]. Atop of the MO thin films, favorable next-generation PV cells such as exciting thin absorber cells [106], DSSC [107], and QDSC [46, 108] are built as they are promising applicants for being stable, eco-friendly, and ultra-low-cost PV materials.

SILAR accounts itself directly into the third generation, by affording ultra-thin, compositionally fabricated by layers of several semiconductors that could be subjugated in a diversity of device architectures. Besides Si, most of the absorbers in PVs are conventionally II–VI, III–V semiconductors, or organic polymers, or small molecules, or perovskites. Still, the number of metal oxides is not adequate, which can be effectively used as absorber layers. Consequently, research into SILAR-grown light absorber layers for PV device applications has been aimed mainly on selective transition metal oxides, sulfides, and selenides. These materials have drawn incredible interest in technological and scientific research due to their unique optical, electrical, and mechanical properties in the past few decades [109, 110, 111]. Nevertheless, there are some examples of SILAR grown metal oxides, sulfides, and selenides applied in different types of solar cells such as thin film, DSSC, perovskite, and QDSC as summarized in Table 5. The layers were used not only to achieve high efficiency, but also served diverse roles inside the PVs such as light absorber, selective charge transport (electrons or holes), and passivation.

AbsorberCellTypeCurrent densityCircuit voltageFill factorη
%
Refs.
Jsc, mAcm−2Voc, mVFF, %
Cu2OCu2O/Pt: FTOThin film3.290.35300.35[24]
Cu2OCu2O/MAPbI3/PCBMPerovskite16.520.89568.23[112]
ZnOZnO/Pt: FTODSSC4.040.44330.59[102]
ZnOZnO/Pt: FTODSSC5.430.42320.70[113]
TiO2FTO/TiO2/N3/I - I3/Pt: FTODSSC8.170.42341.16[27]
TiO2FTO/TiO2/spiro OMeTAD/AuPerovskite18.050.8166.3∼10[114]
CuS, Ag2SCuS/Sn: Ag2SThin film8.30.66522.85[44]
CdS, PbSITO/CdS/PbS/CThin film0.870.1431.40.13[19]
Bi2Se3n-Bi2Se3/0.1 M polysulfide/CThin film0.520.12430.03[115]
Sb2Se3FTO/TiO2/Sb2Se3/electrolyte/PtSSC4.190.5751.661.22[60]
CdSFTO/TiO2/CdS QD/I-I3/Pt: FTOQDSC3.810.7661.91.80[46]
SnSGr/TiO2/SnS QD/I-I3/Pt: FTOQDSC1.350.52420.30[108]
CdSeZnO/CdS/CdSe QD/MnS/electro. /Cu2SQDSC13.740.60443.70[116]
CdSeFTO/TiO2/CdSe/ Na2S: S/CoS2QDSC16.860.54393.53[117]
CdS: MnMn-d-CdS/CdSe/S2−-S/RGO/Cu2SQDSC20.70.56475.42[118]
CdSeFTO/TiO2/CdS/CdSe/S2−-Sn2−/Cu2SQDSC13.640.56513.89[119]
PbS: HgFTO/TiO2/PbS: Hg QD/S2−-Sn2−/Cu2S/BrassQDSC300.4046.85.6[120]
PbSFTO/TiO2/PbS QD/ S2−-Sn2−: CH3OH/Cu2SQDSC18.340.4350.864.01[121]
SnSeFTO/TiO2/SnSe QD/S2−-Sn2−/Cu2S /BrassQDSC6.940.57190.78[122]

Table 5.

SILAR growth PV cells demonstrating with the cell properties.

N.B. N3: ethanolic 0.3 mM cis-Bis (isothiocyanato) bis (2,2′-bipyridyl-4,4′-dicarboxylato ruthenium (II).

In many cases, the core light-absorbing layers, within the solar cells, fabricated via SILAR have been investigated. For example, in ITO/CdS/PbS/C heterojunction solar cell, n-type layer, CdS thin films were deposited by CBD on transparent conductive oxide (ITO) substrates, whereas PbS film by SILAR using different deposition cycles, 15, 20, 30, 40 and 60 to obtain different thicknesses, showed that 40 cycles PbS film has a greater photovoltaic conversion efficiency [115]. In another study, p-type CuO was utilized as photo-absorber in the p-CuO/n-Si heterojunction cell [123], where a vibrant role of the SILAR deposition was observed in the overall device performance, depending mainly on the concentration of the copper precursor solution. In an all-oxide solar cell, NiO/Cu2O or CuO/ZnO/SnO2, both Cu2O and CuO fabricated were examined as light absorber fabricated by SILAR and the hole transporting layer (p-type NiO), buffer layer (ZnO) as well as n-type SnO2 were deposited by sol-gel method [124]. The cell having Cu2O showed better performance than CuO, which is due to the reduced conductivity, mobility, and carrier concentration of CuO. However, the study showed an overall efficiency over 1%. In a different study, heterojunction solar cells have been fabricated between layers of p-type CuS and n-type Ag2S deposited via SILAR method and Sn2+ and Al3+ heterovalent dopants are introduced in Ag2S so that Fermi energy of the semiconductor can be modified to alter the band diagram of pn junctions. The Sn2+-doped Ag2S resulted in better solar cell parameters with an efficiency of 2.85% as compared to that based on Al3+-doped Ag2S, which consists of many defect states due to mismatch in ionic radii of the cation and the dopant ions [44].

Further, metal oxides were worked in charge transportation in between different layers in solar cells, and both electron transport layer (ETL) and hole transport layer (HTL) can enhance the performance of PVs. Since the early 1990s, TiO2 is one of the key materials used as ETL owing to its wide popularity in DSSC [120]. In a recent study, TiO2 nanocrystalline film was directly deposited using SILAR at 90°C for perovskite solar cell applications and used as an ETL [114]. Due to the fast charge transport, kinetics and slow charge recombination process of the TiO2 ETL synthesized from the solutions of TiCl4 and hot K2S2O8, with subsequent annealing at 450°C, advances the efficiency of the cell to around 10%. Further, a couple of studies showed the deposition of TiO2 layers from solutions of TiCl3 and NaOH [27, 125] followed by annealing at 400°C, as ETLs in DSSC with the modest efficiency of just over 1%. Other SILAR-fabricated layers used as ETLs in PVs consist of ZnO and ZrO2 as interfacial layer attached to porous TiO2, both demonstrated performance in DSSC [102, 126].

In this study, Cu2O thin films were introduced as a HTL in a planar perovskite solar cell and successfully enhanced the efficiency of the cell to around 8.23%, as shown in Figure 5(a-c). The Cu2O films were deposited via SILAR by followed the complexation reaction of copper and ammonia with H2O2 [112]. The methylammonium lead triiodide (MAPbI3) perovskite layer is sandwiched between a p-type Cu2O HTL layer and another n-type PCBM (phenyl-C61-butyric acid methyl ester) ETL layer, respectively. The Cu2O films demonstrated suitable band structure after annealing at 170°C and boosted device performances better than conventional sol-gel-deposited NiO and Cu-doped NiO hole transport layers, confirming the quality of the SILAR-Cu2O.

Figure 5.

(a) Cell structure, (b) schematic energy level diagram; the dashed line represents the Fermi energy after contact (c) current-voltage characteristics of under dark and a white light illumination condition of Cu2O/MAPbI3/PCBM heterojunction [112].

In a report of 2009, Lee et al. showed a novel technique for preparing selenide (Se2−) by the SILAR process in pursuit of efficient QD-sensitized solar cells atop of mesoporous TiO2 photoanodes. After several optimization of the QD-sensitized TiO2 films via regenerative photoelectrochemical cells in presence of a cobalt redox couple [Co(o-phen)32+/3+], with a final layer of CdTe, the overall efficiencies of the was recorded around 4.2% at 100 Wm−2 [127]. To find the answer to a question, “How does a SILAR CdSe film grow?” Becker et al. tuned the deposition steps to suppress interfacial charge recombination in FTO/TiO2/CdSe/Na2S: S/CoS2 cell by showing an efficiency of 3.53% [117]. Recently, in another report, SILAR- and CBD-grown CdSe-sensitized TiO2 solar cells were examined concentrating on the influences of two commonly used QD deposition techniques [119], and atop of pre-accumulated CdS seed layers, a successful CdSe deposition was performed. The PEC of both the cells has been recorded as 4.85%, for CBD grown CdS/CdSe cell, whereas for SILAR grown cell the value was 3.89%. One research group enhanced the PCE of CdS/CdSe/S2−-S/RGO/Cu2S cell to 5.4% by employing Mn2+ doping of CdS via SILAR method [118], whereas another group reported on a PbS: Hg QD-sensitized solar cell by Hg2+ doping into PbS employing similar deposition technique and showed an unprecedentedly high JSC of 30 mA/cm2 with the PEC of 5.6% [120]. More studies are ongoing with great efforts to find new alternative, clean, and environment-friendly energy resources due to the increasing demands.

4.3. Photoelectrochemical water splitting

Hydrogen energy is a key issue to cope with the present global energy crisis and environmental complication exploiting clean and inexhaustible energy [128]. Photoelectrochemical (PEC) water splitting is a promising technique to create hydrogen fuel by utilizing solar energy. Within the nonstop efforts in developing efficient photoelectrodes, the major challenge researchers presently face is to explore cost effective, nontoxic, and earth-abundant photoelectrodes with high efficiency [129]. In a recent study, Ag/Ag2WO4 was fabricated on ZnO nanorods using 0.05 M AgNO3 and 0.05 M Na2WO4 as the cationic and anionic precursors, respectively, by following SILAR technique and the composite material demonstrated outstanding performances in PEC water splitting with 3 mAcm−2 at 1.23 V versus RHE in the presence of 0.1 M Na2SO4 electrolyte. Based on these results, a brief possible updated mechanism of the PEC activity was demonstrated by Adam et al. for the better understanding of the technique with Figure 6 [130]. The development of PEC activity of the semiconductors was principally attributed to electrons and hole transfer at the interfaces of the photoelectrodes. The band edge potentials of the Ag/Ag2WO4 and the ZnO materials showed a significant role in the efficiency of growth and separation technique of the electron (e) and hole (h+) pairs. The energy of valence band (EVB) of ZnO and Ag2WO4 is calculated as +2.86 and + 3.03 eV, whereas energy of conduction band (ECB) of them is projected as −0.34 and − 0.07 eV, respectively [131].

Figure 6.

(a) and (b) FM-SEM images of the ZnO NRs and the ZnO/Ag/Ag2WO4 heterostructure. (c) Curves of the ZnO NRs, and the ZnO/Ag/Ag2WO4 photo-electrodes under light and dark conditions using linear sweep voltammetry. Schematic diagram presenting the energy band structure and probable electron-hole separation as well as transportation in ZnO/Ag/Ag2WO4 heterostructure with the SPR effect [130].

In sunlight, both the semiconductors absorb light and the electrons in the VB become excited up to a higher potential of −0.34 and − 0.07 eV for the ZnO and Ag2WO4, respectively. Consequently, due to high photon energy, within the semiconductor, the effective charge transfer process proceeds. Ag0 nanoparticles (NPs) cause active separation of h+ or e pairs upon the absorption of light owing to the surface plasmon resonance (SPR) effect. Electrons from the Ag NPs are transported to the CB of the Ag2WO4 and the ZnO, while holes persist in the Ag NPs. In the meantime, to occupy the vacant holes created by the plasmonic absorption, the photogenerated electrons in the CB of ZnO will be transported to the Ag NPs [132]. The photogenerated charge carriers can be proficiently separated to enhance the PEC performance by following this mechanism. Further, the photogenerated electrons will eventually reach at the Pt electrode (counter) and contribute to H2 generation. Also, the photogenerated holes in the VB of Ag2WO4 and ZnO will contribute on O2 production via H2O oxidation. Hence, these outcomes validate the modification via Ag/Ag2WO4, which is an active technique to attain a high PEC activity by means of ZnO NRs arrays.

Like the above example, many studies based on SILAR had been devoted toward exploring the potential of semiconductor thin films as photoelectrodes for water splitting as shown in Table 6 with their potential applications. In terms of low-cost, simplicity, and theoretically high solar to H2 efficiency, PEC water splitting is much more favorable than solar photobiological, photochemical, and thermochemical generation of hydrogen [146]. The most investigated semiconductor materials include BiVO4, Fe2O3, CuCoO2, WO3, and TiO2 [147]. Other semiconductor materials such as Cu2O [24, 148, 149], ZnO [150, 151], TiO2 [152, 153], and CdO [28] were also produced using SILAR method but the PEC performances are quite low under visible light due to their wide bandgap.

FilmsElectrolytepHPrecursorsRinsingCurrent densityLight sourceRefs.
Cationic 1Cationic 2AnionicmAcm−2lamp
Ag3VO4Na2CO311.4Ag3VO4Na3VO4DI H2O0.07Xe arc[36]
BiVO4Na2SO37Bi(NO3)3NH4VO3DI H2O, H+∼1.2Xe[37]
BiVO40.1 M KPi7Bi(NO3)3NH4VO3HNO31.5Thorlabs[68]
Fe2V4O13Na2SO39.2Fe(NO3)3(NH4)6Mo7O24NH4VO30.028300 mWcm−2[38]
TiO2 NR/BiOINa2SO4Bi(NO3)3KI0·40Xe[133]
SILAR-BiVO4Co-Pi7Bi(NO3)3HNO3NH4VO32.3Plasma[134]
Bi2Mo2O9@Bi2MoO6K3PO47Bi(NO3)3(NH4)6Mo7O24DI H2O0.16Xe arc[135]
WO3/BiVO4H2SO4BiNO3NH4VO3DI H2O1.9Xe[136]
Fe2O3/TiO2/FTONaOH13.6FeCl3NaOHDI H2O0.4Xe arc[137]
Ti: α-Fe2O3NaOH13.6FeCl3Ti{OCH(CH₃)₂}₄NaOHDI H2O0.85Xe arc[138]
CuCoO2/BiVO4Na2SO36.86Bi(NO3)3KI3.3Xe lamp[139]
ZnFe2O4/BiVO4Na2SO47Zn(NH3)4+2FeSO4NaOHH2O21.46Sim. Sun.[140]
CuWO4/BiOIK3PO47Bi(NO3)3KI(CH₂OH)₂2.10AM1.5 G[141]
Ag/Ag2WO4/ZnONa2SO4Ag(NO)3Na2WO4DI H2O3Xe[130]
Fe2O3/BiVO4KH2PO47Fe(NO3)3NaOH1.63Xe[142]
TiO2/BiVO4/NiFe-LDHNa2SO4Bi(NO3)3NH4VO3DI H2O0.018Xe[143]
BiVO4/ZnONa2SO5Bi(NO3)3NH4VO31.72Xe[144]
AgVO3/Mo: BiVO4Na2SO46.4AgNO3NH4VO3DI H2O1.93Xe arc[145]

Table 6.

SILAR growth films demonstrating the properties of photoelectrochemical water splitting at 1.23 V vs. RHE.

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5. Factors affecting SILAR deposition

A lot of research work has been done on the deposition and optimization of the SILAR thin films for optoelectronic device applications. Solution concentration, composition of precursors, the number of SILAR cycles, pH, annealing, and doping will absolutely affect the quality and quantity of thin films, which directly influence the cell performance. The effect of different parameters used in SILAR deposition on the performance of thin films is reviewed based on the contemporary research work.

5.1 Solution concentration

Solution concentration of the used precursor is one of the key factors in governing the properties as well as the performances of SILAR grown thin films. From a general viewpoint, depositing through a more concentrated solution results with bigger grain size and higher surface roughness during deposition. Consequently, thinner, smoother, and probably pinhole-free deposition can be attained using multiple SILAR cycles with a lower concentrated precursor solution.

With the increase of molar concentration (0.03, 0.05, and 0.1 M) of the cationic solution prepared by Cd(CH3COO)2 and H2O2, the surface morphology of the SILAR-deposited nanostructured CdO thin films was improved toward the crack free and homogeneous nature [154]. On the other hand, the structural change such as nanorods, nanoflowers, and nanoflakes morphologies was observed by altering only the concentration of anionic precursors NaOH (high, 0.05 M; moderate, 0.01 M; and low, 0.001 M) with fixed Zn precursor concentration (0.005 M) [155]. A comparative study of CdS films deposited by SILAR and CBD techniques revealed that the S/Cd ratio in the sample increases (0.83 to 1.04) for SILAR deposited films with the molar concentration of sulfur (1:1, 3:1, 5:1 and 7:1) in the starting solution increases, while it was almost constant (∼0.80) for CBD films [156]. During the investigation of the effect of the molar concentration of pyrrole monomer on the electrochemical behavior of highly pristine poly-pyrrole flexible electrodes, it was shown that among 0.025 M, 0.05 M, and 0.1 M pyrrole, the 0.1 M pyrrole exhibited excellent performance with specific capacitance as high as 899.14 Fg−1 at 5 mVs−1 in 0.2 M Na2SO4 showing retention stability of 61.5% even after 2000 cycles [107]. The SILAR synthesis, in such case, was performed on the stainless steel strips, which were firstly immersed in pyrrole precursor, followed by 30% H2O2 for 10 s each [107]. Further, studies on the use of the optimum precursor concentration of different Mn dopant (0.04 M, 0.075 M and 0.1 M) in CdS QDSSCs reveal that 0.075 M Mn-doped CdS can strongly enhance the incident photon to charge carrier efficiency (IPCE), due to the improved light harvesting, electron injection as well as charge collection efficiencies. As a result, the PCE of SILAR-grown Mn/CdS QDSC is up to 3.29%, which is much higher than that of QDSC without doping (2.01%) as well as other used concentration of Mn dopant under standard simulated AM 1.5 G, 100 mW cm−2 [157].

5.2 Effect of precursors

ZnO is one of the most investigated materials performed by SILAR technique. During fabrication, among the other properties precursor selection is one of the key requirements. In this study, the role of the precursor materials such as Zn(CH₃COO)₂, ZnSO₄, and ZnCl2 on the properties of SILAR-deposited ZnO films were examined and the outcomes showed that the films fabricated by utilizing Zn(CH₃COO)₂ and ZnSO₄ precursors exhibited better optical properties than ZnCl2. Besides, the crystallite sizes of all the fabricated samples were increased upon annealing [158]. On the other hand, the effect of four different precursors of Zn(NO3)2, Zn(CH3COO)2, ZnSO4, and ZnCl2 on structural, morphological, electrical and optical properties of AZO thin films using SILAR method was examined. After varying the different precursors, the significant effects on film crystallization, surface morphology, optical nature, and electrical resistivity of the deposited films were studied, in which chloride precursor demonstrated the best performance [159].

Sfaelou and co-workers studied the effect of the nature of three cadmium precursors such as Cd(NO3)2, CdSO4, and Cd(Ac)2 on the effectiveness of CdS SILAR deposition and measures the performance of sensitized solar cells and photo fuels. The CdS reflection spectra, load, and the size of CdS nanoparticles varied a lot from one precursor to the other as shown in Figure 7(a-e). The highest load and the largest nanoparticles were obtained in the case of Cd(Ac)2, and the smallest in the case of Cd(NO3)2. And acetate-derived photoanodes provide more effective outcomes in the case of QDSSCs, while nitrate-derived precursors were more effective in the case of photo fuel cells as in Figure 7(f, g) [11]. In a similar but detailed study, Zhou and co-worker showed almost similar results showing a better performance of Cd(Ac)2 over Cd(NO3)2 during the study of another CdS QDSCs as shown in Figure 7(h) [119]. Another recent investigation on the effect of different precursors such as Mn(CH₃CO₂)₂, MnCl2, and MnSO4 on electrochemical properties of Mn3O4 thin films prepared by SILAR method using 1 M Na2SO4 aqueous electrolyte exhibited the specific capacitance of 222, 375, and 248 Fg−1, respectively, at 5 mVs−1 scan rate. Hence, the MnCl2-derived Mn3O4 electrode showed a good electrochemical with maximum energy density of 17 Whkg−1 and power density of 999 Wkg−1 at 0.5 mAcm−2 current density showing retention stability of 94% after 4500 CV cycles [160]. Besides, a study of SILAR-deposited SnO2 films showed improvement of the crystallite with solution molarity performed by using different precursor concentration of both cations and anions [161].

Figure 7.

TEM and HRTEM photographs of (a) pure titania and titania loaded with CdS deposited by using the three precursors: (b) Cd(NO3)2, (c) CdSO4, and (d) Cd(Ac)2. (e) Reflection spectra using Cd(NO3)2, CdSO4, Cd(Ac)2, and titania film without CdS. J − V curves recorded with a (f) QDSSC and (g) photo fuel cell employing 1 cm2 active photoanode and 2.25 cm2 active cathode electrode [11]. (h) J − V characteristics of CdS QDSCs fabricated by using acetate and nitrate precursors and measured under the illumination of one sun (AM 1.5, 100 mW/cm2) [119].

5.3 Number of deposition cycles

SILAR technique involves the successive immersion of the substrate in anionic and cationic precursors following the substrate rinsing procedures in between. The deposition rate and the thickness of the required films can be simply controlled over a wide range by varying the deposition cycle and there are no boundaries on the substrate material, dimensions, or surface profile to be used, which in turn influence the properties such as crystallite size, surface morphology, and possibly light absorption. Nevertheless, overloading may consequence in delamination and fragmentation of the films owing to undesirable mechanical stress. The number of cycles optimization is therefore requisite to all SILAR system for the anticipated utilization.

Recently, lily flower-like ZnO structures were demonstrated by a group of researchers deposited by SILAR method [162]. In the study, lily flower-like morphologies were obtained when the deposition cycle number increases from 1 to 10 as shown in Figure 8(a-d). Another group, while studying the growth of porous Fe2V4O13 films for photoelectrochemical water oxidation, the deposition cycle had directly altered the current density as shown in Figure 8(e). The highest photocurrent was achieved at the potential of 1.23 V vs. RHE for a Fe2V4O13 film attained through 20 deposition cycles, which was chosen to improve the performance of the material further [38]. Further, Das and coauthors studied the influence of dipping cycle on SILAR-synthesized NiO thin film and observed that 40 cycle dipping NiO electrode provides highest specific energy of 64.38 WhKg−1 with the highest specific power 2305 WKg−1, by retaining fast electron transfer as well as admission of electrolyte ions much easily due to porous nanostructure of fabricated electrode [78]. Moreover, other efforts including the effect of immersion cycles on structural, morphology, and optoelectronic properties such as Ag2S [163], CdO [164], ZnS [165] thin films were studied extensively, which make them desirable for optical coating as well as other opto-electronic applications.

Figure 8.

(a-d) FE-SEM photographs of ZnO lily flower-like structures deposited by varying number of deposition cycles via SILAR method [162]. (e) Chopped LSVs of Fe2V4O13 films with different number of cycles annealed at 500°C for 1 h in a buffer solution of pH 9.2 [38].

5.4 Impact of pH

By altering the pH of both cationic and anionic precursors, it is possible to tune the bandgap of thin films over a wide range for optoelectronic device applications. Preetha and co-workers investigated the effect of cationic precursor pH on optical as well as transport properties of SILAR-fabricated nanocrystalline PbS thin films. They successfully showed that the pH of the cationic precursor and in turn the size of the crystallites affect the optical and electrical properties of PbS thin films [166]. Besides, Sakthivelu and coauthors demonstrated a similar effect on ZnO thin films that the grain size of ZnO increased with the increase in pH of the precursor solution as represented in the SEM micrograms in Figure 9(a-e). The film deposited at pH =8.5 shows aggregated and non-uniform grains, while flower-like appearance appeared at pH =9. Later, at pH =9.5, bigger grains with hexagonal nanorods structure appeared and finally, at pH =10, the size of the nanorods increased further with the well elongated nanorods sticking with each other. They also showed a decrease of bandgap from 3.29 to 3.09 eV with the increase of pH [167].

Figure 9.

SEM micrograms of ZnO thin films prepared at (a) pH = 8.5, (b) 9.0, (c) 9.5, (d) 10.0, and (e) 10.5 [167].

Moreover, both acidic and basic mediums can be used based on the requirement to deposit films as listed on Table 7. Farhad and co-author worked on Cu2O thin film under pH range from ∼2 to 8 [169, 170], while Gençyılmaz [171] and Visalakshi et al. [172] on CuO thin film under pH range from ∼9 to 12 by showing promising electrical and optical properties. In another research, CdO was deposited using Cd(CH3COO)2 as a cationic precursor and thickness as well as bandgap tuning was effectively observed in the pH range of 11.3 to 12.5, in addition to NH3 solution [173]. However, not only a wide range of study to understand the influence of pH on the thin films fabricated by SILAR, but also more device fabrications were performed under diverse pH conditions with excellent performance, as described in the application section.

FilmpHPrecursorsTo Adjust pHThickness (nm)Crystallite size (nm)Dislocation density (δ × 1015 lines m−2)Strain (ε × 10−3lines−2 m−4)Texture coefficient TC (hkl)Bandgap (eV)Resistivity ×103(Ωcm)Refs.
CationicAnionic
Cu2O2.35[Cu(S2O3)]*2 M NaOHSA340173.4602.280.7442.050.21[169]
3.45*2 M NaOHAA729212.2682.110.7562.100.18
4.502 M NaOHAA80015–222.3072[170]
5.102 M NaOHAA10002.28103
6.202 M NaOHAA18002.43742
7.33*2 M NaOH1130183.0862.200.7682.150.37[169]
7.33#1 M NaOH336135.9172.900.5612.160.18
7.952 M NaOH147715–222.4221.9[170]
CuO9.0[Cu(NH3)4]2+H2O4237.40.7149.261.211.61[171]
9.5H2O6722.41.99215.41.171.49
10.0H2O8522.91.90615.11.071.49
10.0H2OSA520145.1022.311.052.176.5[172]
10.5H2OSA590212.2681.631.342.075.5
11.0H2OSA680271.3721.481.652.024.0
11.5H2OSA770301.1111.331.711.994.25
12.0H2OSA820360.7161.241.831.894.5
CdO11.3Cd(CH3COO)2H2ONH352014.595.442.482.523.26[173]
11.7H2ONH3139016.864.092.151.893.21
12.1H2ONH3182017.223.912.101.902.67
12.5H2ONH3236017.383.842.081.712.35

Table 7.

Properties of thin films deposited by varying solution pH via SILAR method [168].

OP = Optimized precursor (2 M NaOH), NOP = Non optimized precursor, SA = Sulfuric acid and AA = Acetic acid.


5.5 Annealing

SILAR is currently in demand to maintain the high quality of films with high growth rate. Despite extensive efforts, the adsorption of complex agents from precursors, drop of rinsing time, and slow production rate for almost all kinds of films has still been a main disadvantage, which restricts its usage in semiconductor industry. New deposited films may have defects, for instance, oxide vacancies and hydroxide phase since the presence of hydroxide phase is unavoidable owing to an aqueous alkaline medium for fabrication [174]. However, annealing of films can minimize such defects and eliminates the hydroxide phase along with the recrystallization. As high-temperature annealing mostly induces a rise in crystallite size, and possibly alters in morphology, which is steady with thermally induced grain growth. Still, the bandgap does not allow a steady trend with annealing due to numerous factors coming into ground outlining the absorption onset: size of particles, existence of defects, stoichiometry as well as existence of oxygen vacancies, etc. [175].

Putri and co-authors studied annealing temperature effect on the photovoltaic performance of BiOI-based materials and showed that at 300°C temperature, the role of the device which consisted of Bi7O9I3 attained three times higher efficiency than the annealed parent BiOI at 100°C. Hence, the structural tuning due to the addition of oxygen via annealing to BiOI structure had an influence on the photoelectrochemical cell [69]. Besides, Ashith and co-worker studied the effect of post-deposition annealing on the properties of ZnO films and demonstrated that the crystallite size of the films increased significantly after annealing. The annealed films further showed very high absorption in the UV region with marginal modification in bandgap. Both the crystallite size and optical absorbance were observed to rise proportionately with the annealing temperature [176]. In a separate study of annealing and light effect on structural, optical and electrical properties of CuS, and Cu0.6Zn0.4S thin films grown by the SILAR demonstrated that the current increase with increasing light intensity and increasing rate in illuminated 500 Wcm−2 films were greater than the others that have annealed at 400°C [43]. Further studies are reported showing grain size increase after annealing or bandgap tuning are listed in the Table 8, including Cu2O, ZnO, CuO, CdO, MgO, NiO etc.

Temperature, 0CPrecursorsCycleTimeCrystalliteBandgapRef
AnnealingGrowthCationicAnionicDipping (sec)Annealing (min)(nm)(eV)
As deposited: Cu2O
200°C: Cu2O
250°C: Cu2O
300 °C: CuO
350°C: CuO
70Cu(S2O3)NaOH10206014
14
14
14–26
--
2.20
2.20
2.20
1.35
1.35
[177]
As deposited: ZnO
200°C: ZnO
300°C: ZnO
400°C: ZnO
90ZnCl2H2O150106018.4
23.1
26.9
27.6
3.1–3.2[176]
As deposited: CuO
200°C: CuO
300°C: CuO
400°C: CuO
CuCl2NH380303011.09
12.05
13.86
14.88
1.17
1.29
1.30
1.36
[178]
As deposited: CuS
200°C: CuS
300°C: CuS
400°C: CuS
RTCuCl2Na2S40303 (N2)16.4
13.1
33.6
37.6
2.03
1.99
1.97
1.87
[43]
As deposited: Cu0.6Zn0.4S
200°C: Cu0.6Zn0.4S
300°C: Cu0.6Zn0.4S
400°C: Cu0.6Zn0.4S
RTCuCl2 + ZnCl2Na2S40303 (N2)38.6
29.9
30.8
27.9
2.14
2.12
2.05
1.85
[43]
As deposited: ZnS
200°C: ZnS
300°C: ZnS
400°C: ZnS
RTZnCl2Na2S40303 (N2)2.7
1.9
3.7
6.3
3.92
3.84
3.67
3.47
[43]
250°C: CdO
350°C: CdO
450°C: CdO
70Cd(NO3)2H2O240201206.11
8.18
9.48
2.44
2.37
2.24
[179]
As deposited: MgO
100°C: MgO
200°C: MgO
300°C: MgO
400°C: MgO
500°C: MgO
90MgSO4H2O30306012
10
10
10
6
6
4.18
4.18
4.22
4.25
4.27
4.33
[180]
As deposited: NiO
200°C: NiO
300°C: NiO
400°C: NiO
90NiCl2H2O100303010.03
11.04
8.24
13.32
3.3
3.25
3.21
3.11
[31]

Table 8.

A list of thin films grown via SILAR and annealed further for better film quality.

5.6 Impact of doping

In order to have a maximum number of carriers to take part in the functioning, a material with low activation energy is necessary so that electrons can easily jump from valence band to conduction band and doping is one of the best options in such structure tuning [181, 182]. In many cases, the incorporation of cation doping is an effective way to improve the electrical conductivity [183, 184]. By decreasing the bandgap, electron transfer between the valence and conduction bands will increase, and thus in case of energy storage device, electrode capacitance will increase [185]. For example, Y-doping in Sr.(OH)2 improves both electronic conductivity as well as electrochemical performance of the electrode for energy storage device [89].

Again, electrochemical performance of In3+-doped WO3/[Cu7Te4/Bi2Te3] electrodes for similar applications enhanced the capacitance to a great extent [90]. The study showed the specific capacity of undoped WO3 was around 64 mAhg−1 whereas it was increased to 90.2 mAhg−1 for the same scan rate of 10 mVs−1 for In3+-doped films, with the high-power density of 1.7 kWkg−1 at the highest energy density of 18.85 Whkg−1. Inside the WO3 lattice, the doped In3+ cation diffused and was connected in the insertion-removal exchange method of electrons, with further electrochemical S2− insertion or extraction striking at the Cu7Te4/Bi2Te3 and polysulfide electrolyte surfaces.

Besides, Zhu and coauthors prepared Cu-doped CdS on QDSCs and investigated the effect of Cu doping on several cells based on the doping concentration. When the doping ratio of Cu decreased successively from 1:10, all the parameters such as Jsc, Voc, and PEC increased and reached at the maximum value when the ratio became 1: 500 [186]. In a separate report of Mn-doped-CdS/CdSe deposited on mesoscopic TiO2 film as photoanode using Cu2S/graphene oxide composite electrode, in the presence of sulfide/polysulfide electrolyte provide PEC of 5.4%, higher than undoped sample [118], whereas Hg2+-doped PbS QDSC having unprecedentedly high photocurrent delivered PEC of 5.6% at one sun illumination over the undoped PbS QD cell [120]. Moreover, Abel and co-workers developed an improved photoelectrochemical water splitting device via SILAR-fabricated Ti-doped α-Fe2O3 thin films. Ti, acting as water oxidation intermediates, enhanced interfacial hole transfer efficiency from less than 3–80% by increasing the concentration of surface-trapped holes, which is then triggered by FeOOH to amplify hole transfer efficiency to ∼100%. Both Ti doping and FeOOH overlayer resulted in photocurrents of 0.85 mAcm−2 at 1.23 V vs. RHE [138]. However, a lot of work has been done by several authors to get better film quality through doping. A list of such initiatives of the doped films with the starting materials of growth and other properties is shown in Table 9.

ProductPrecursorsDopantNo ofCrystalliteGrainBandgapRef
CationicAnionicCompoundAmountCycle(nm)(nm)(eV)
Mn: Fe2O3FeCl2NaOHMnCl2 (wt %)0
2
4
6
8
5028
26
23
21
20
3.02
3.01
3.00
2.97
2.95
[187]
Cu: Mn3O4Mn(NO₃)₂NH4OHCu(NO3)2 (at %)0
0.1
0.2
0.3
2029
25.7
28.4
30
2.09
2.06
1.91
1.71
[188]
Co: CuOCuCl2NH4OHCoCl2 (at %)0
0.5
1
2
3
4
1022.7
15.7
13.6
13.1
12.6
12.2
70
44
42
36
32
38
1.53
1.47
1.45
1.41
1.38
1.36
[189]
B: CuOCuCl2NH4OHH3BO4 (at %)0
1
2
3
1012.9
13.1
14.2
15.9
45
42
38
30
1.52
1.48
1.43
1.39
[190]
Co: Cu2OCu(S2O3)NaOHCoSO4 (wt %)0
1
2
5
10
3062.83
53.30
48.47
39.24
28.44
1.94
2.03
2.12
2.18
2.47
[191]
Fe: Cu2OCu(S2O3)NaOHFeSO4 (wt %)0
1
2
5
3062.83
59.80
41.83
36.40
1.80
2.10
2.36
2.45
[192]
Cr: CdOCd(NO3)2NH4OHCr(NO₃)₃ (M %)0
0.1
0.3
0.5
20129
121
129
131
1000
1000
1000
1000
2.50
2.63
2.78
2.87
[193]
Mn: CdOCd(CH3COO)2NH4OHMn solution (M %)0
1
2
1533.40
39.26
38.15
50
to
35
2.23
2.29
2.39
[194]
Ag: CdOCd(CH3COO)2NH4OHAg+ solution (M %)0
1
2
3
1021
15
17
19
2.12
2.34
2.27
2.18
[195]
Mo: CdSCd(CH3COO2)SC(NH2)2(NH4)6Mo7O24 (at %)0
5
10
15
70~50
~50
~50
~50
2.45
2.46
2.47
2.48
[196]
Sn: CdSCd(CH3COO)2CH4N2SSnCl2 (at %)0
2
4
6
8
7027.20
32.79
24.01
18.87
12.96
2.48
2.50
2.51
2.51
2.43
[197]
Ba: PbSPb(CH3COO)2CH3CSNH2BaCl2 (at %)0
1
2
4
6
8
20018.6
24.8
22.4
26.8
27.6
22.3
480
570
650
475
840
930
1.77
1.86
1.98
2.00
2.08
2.12
[198]
Co: ZnSZn(NO3)2Na2SUndoped
Cu(NO3)2
Co(NO3)2
AgNO3
0
3%
3%
3%
1534
41
49
57
60
to
90
4.12
3.99
3.90
3.78
[199]
F: ZnOZn(CH3COO)2NaOHNH4F (at %)0
5
10
15
5049.67
83.22
52.01
48.98
3.21
3.24
3.23
3.20
[200]
Mg: ZnOZnSO4NaOHCu(CH3COO)2 (wt %)0
1
3
5
5037.6
36.6
36.2
35.1
3.09
3.16
3.24
3.35
[201]

Table 9.

A list of the doped films with some of their properties, fabricated by using SILAR techniques.

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6. Conclusion

This chapter represented detailed discussions on the methods and techniques of the fabrication process of thin films by utilizing SILAR for the optoelectronic device applications. Among the diverse fabrication techniques both physically and chemically, SILAR is the simplest to fabricate thin films having remarkable quality. It is widely fit for the fabrication of thin films of metal chalcogenides, hydroxides, peroxides, as well as complex and composite nanostructures with innovative functionalities. The role of experimental conditions on the structural, optical, and electrical properties of the thin films as well as device performances is reviewed in this chapter mainly for the advanced utilization of both the generation and storage of energy such as solar cells, photoelectrochemical water splitting, supercapacitors, and so on. The technological advancement of a fabrication technique is deeply reliant on the opportunity of controlling the experimental factors involved. In this chapter, a brief advantage of SILAR technique is highlighted, including flexibility of the film growth, thickness control, composition control, and low temperature management, along with a broad range of applications. From this point of view, a deep knowledge of the connections between processing, structure, specific characteristics, and performances is the foundation for accurate and rational engineering of such optoelectronic devices. Moreover, a comprehensive profile of recent status is required to focus on further prospects. This work will therefore deliver a strong contribution to move ahead with future research goals on SILAR technique, by utilizing low-cost deposition of high-quality thin films and associated optoelectronic devices.

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Acknowledgments

The author thanks the Department of Chemistry, Comilla University and UGC, Bangladesh, for supporting this work. Also, thanks to Professor Dr. Jamal Uddin, Center for Nanotechnology, Department of Natural Sciences, Coppin State University, Baltimore, MD, USA, for his insightful discussion and support.

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Conflict of interest

The authors declare no conflict of interest.

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Written By

Md Abdul Majed Patwary

Submitted: 11 June 2022 Reviewed: 11 July 2022 Published: 22 December 2022