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A Robust Motion Tracking Control of Piezo-Positioning Mechanism with Hysteresis Estimation

Written By

Amir Farrokh Payam, Mohammad Javad Yazdanpanah and Morteza Fathipour

Submitted: June 15th, 2011 Published: June 13th, 2012

DOI: 10.5772/38244

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Written By

Amir Farrokh Payam, Mohammad Javad Yazdanpanah and Morteza Fathipour

Submitted: June 15th, 2011 Published: June 13th, 2012