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Nano-Accuracy Surface Figure Metrology of Precision Optics

Written By

Shinan Qian and Peter Takacs

Submitted: May 30th, 2011 Published: May 16th, 2012

DOI: 10.5772/37100

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Written By

Shinan Qian and Peter Takacs

Submitted: May 30th, 2011 Published: May 16th, 2012