Open access

Nano-Accuracy Surface Figure Metrology of Precision Optics

Written By

Shinan Qian and Peter Takacs

Submitted: 30 May 2011 Published: 16 May 2012

DOI: 10.5772/37100

From the Edited Volume

Modern Metrology Concerns

Edited by Luigi Cocco

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Written By

Shinan Qian and Peter Takacs

Submitted: 30 May 2011 Published: 16 May 2012