Open access peer-reviewed chapter

FAIMS Biochemical Sensor Based on MEMS Technology

Written By

Fei Tang, Xiaohao Wang and Chulong Xu

Submitted: October 15th, 2010Reviewed: March 7th, 2011Published: July 27th, 2011

DOI: 10.5772/16814

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Written By

Fei Tang, Xiaohao Wang and Chulong Xu

Submitted: October 15th, 2010Reviewed: March 7th, 2011Published: July 27th, 2011