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Strength Reliability of Micro Polycrystalline Silicon Structure

Written By

Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto

Submitted: October 18th, 2010 Published: June 9th, 2011

DOI: 10.5772/17032

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Written By

Shigeru Hamada, Kenji Hasizume, Hiroyuki Nakaura and Yoshihide Sugimoto

Submitted: October 18th, 2010 Published: June 9th, 2011