Open access peer-reviewed chapter

Monte Carlo Simulation for Ion Implantation Profiles, Amorphous Layer Thickness Formed by the Ion Implantation, and Database Based on Pearson Function

Written By

Kunihiro Suzuki

Submitted: May 26th, 2010 Reviewed: August 30th, 2010 Published: February 28th, 2011

DOI: 10.5772/14539

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Written By

Kunihiro Suzuki

Submitted: May 26th, 2010 Reviewed: August 30th, 2010 Published: February 28th, 2011