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Volatile Precursors for Films Deposition: Vapor Pressure, Structure and Thermodynamics

Written By

Igor K. Igumenov, Tamara V. Basova and Vladimir R. Belosludov

Submitted: 28 April 2010 Published: 14 January 2011

DOI: 10.5772/13356

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Written By

Igor K. Igumenov, Tamara V. Basova and Vladimir R. Belosludov

Submitted: 28 April 2010 Published: 14 January 2011