Open access peer-reviewed chapter

Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser

By Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi

Submitted: March 28th 2011Reviewed: September 13th 2011Published: February 3rd 2012

DOI: 10.5772/31205

Downloaded: 2595

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi (February 3rd 2012). Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser, Micromachining Techniques for Fabrication of Micro and Nano Structures Mojtaba Kahrizi, IntechOpen, DOI: 10.5772/31205. Available from:

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