Open access peer-reviewed chapter

Focused Ion Beam Based Three-Dimensional Nano-Machining

By Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

Submitted: March 16th 2011Reviewed: September 27th 2011Published: February 3rd 2012

DOI: 10.5772/30218

Downloaded: 3585

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim (February 3rd 2012). Focused Ion Beam Based Three-Dimensional Nano-Machining, Micromachining Techniques for Fabrication of Micro and Nano Structures, Mojtaba Kahrizi, IntechOpen, DOI: 10.5772/30218. Available from:

chapter statistics

3585total chapter downloads

1Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

Next chapter

Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining

By Fei Xu, Jun-long Kou, Yan-qing Lu and Wei Hu

Related Book

First chapter

Principles and Applications of Nanoplasmonics in Biological and Chemical Sensing: A Review

By Parsoua A. Sohi and Mojtaba Kahrizi

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

More About Us