Open access peer-reviewed chapter

Focused Ion Beam Based Three-Dimensional Nano-Machining

By Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

Submitted: March 16th 2011Reviewed: September 27th 2011Published: February 3rd 2012

DOI: 10.5772/30218

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Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim (February 3rd 2012). Focused Ion Beam Based Three-Dimensional Nano-Machining, Micromachining Techniques for Fabrication of Micro and Nano Structures, Mojtaba Kahrizi, IntechOpen, DOI: 10.5772/30218. Available from:

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