Open access peer-reviewed chapter

Molecular Dynamics Study on Mold and Pattern Breakages in Nanoimprint Lithography

By Masaaki Yasuda, Kazuhiro Tada and Yoshihiko Hirai

Published: February 1st 2010

DOI: 10.5772/8192

Downloaded: 1517

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Masaaki Yasuda, Kazuhiro Tada and Yoshihiko Hirai (February 1st 2010). Molecular Dynamics Study on Mold and Pattern Breakages in Nanoimprint Lithography, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8192. Available from:

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