Open access peer-reviewed chapter

Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques

By Tae-Ho Yoon, Lan-Young Hong and Dong-Pyo Kim

Published: February 1st 2010

DOI: 10.5772/8187

Downloaded: 5644

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Tae-Ho Yoon, Lan-Young Hong and Dong-Pyo Kim (February 1st 2010). Fabrication of SiC-based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Softlithography Techniques, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8187. Available from:

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