Open access peer-reviewed chapter

Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint

By Harutaka Mekaru

Published: February 1st 2010

DOI: 10.5772/8191

Downloaded: 2691

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Harutaka Mekaru (February 1st 2010). Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint, Lithography Michael Wang, IntechOpen, DOI: 10.5772/8191. Available from:

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