Open access peer-reviewed chapter

High-Resolution Ion Implantation from keV to MeV

By Sébastien Pezzagna and Jan Meijer

Submitted: May 3rd 2011Reviewed: October 31st 2011Published: May 30th 2012

DOI: 10.5772/34601

Downloaded: 2472

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Sébastien Pezzagna and Jan Meijer (May 30th 2012). High-Resolution Ion Implantation from keV to MeV, Ion Implantation, Mark Goorsky, IntechOpen, DOI: 10.5772/34601. Available from:

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