Open access peer-reviewed chapter

Shear Mode Piezoelectric Thin Film Resonators

By Takahiko Yanagitani

Submitted: October 29th 2010Reviewed: July 19th 2011Published: November 14th 2011

DOI: 10.5772/18797

Downloaded: 2764

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Takahiko Yanagitani (November 14th 2011). Shear Mode Piezoelectric Thin Film Resonators, Acoustic Waves - From Microdevices to Helioseismology, Marco G. Beghi, IntechOpen, DOI: 10.5772/18797. Available from:

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