Open access peer-reviewed chapter

Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication

By Jyoti Prakash Kar and Gouranga Bose

Submitted: November 10th 2010Reviewed: July 8th 2011Published: November 14th 2011

DOI: 10.5772/20840

Downloaded: 4529

© 2011 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Jyoti Prakash Kar and Gouranga Bose (November 14th 2011). Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication, Acoustic Waves - From Microdevices to Helioseismology, Marco G. Beghi, IntechOpen, DOI: 10.5772/20840. Available from:

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