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Aluminum Nitride (AlN) Film Based Acoustic Devices: Material Synthesis and Device Fabrication

Written By

Jyoti Prakash Kar and Gouranga Bose

Submitted: 10 November 2010 Published: 14 November 2011

DOI: 10.5772/20840

From the Edited Volume

Acoustic Waves - From Microdevices to Helioseismology

Edited by Marco G. Beghi

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Written By

Jyoti Prakash Kar and Gouranga Bose

Submitted: 10 November 2010 Published: 14 November 2011