This chapter presents the technique in producing the nanoporous silicon membrane using electrochemical etching technique. Electrochemical etching technique is a self-adjusting technique due to its ability to control transfer of ion to form pore by manipulating certain parameters. There are several parameters that have been manipulated to study the effect of each parameter to the pore formation by characterizing each component. The project starts with fabrication of silicon membrane and then continues with characterization of HF concentration, current density, doping and also alcohol diluents using field emission scanning electron microscopy (FESEM). The effect of each parameter is discussed in terms of pore size, pore formation and pore structure. Finally, the pore with size less than 100 nm and columnar structure has formed using this technique. The star-shaped structure is also formed through this experimental setup. Improved nanoporous silicon membrane can be applied for filtration and separating particles, especially in an artificial kidney.
Part of the book: New Research on Silicon