This chapter presents a photo-lithographically-based technology for mass production of three-dimensional (3D) micro-structures with shell elements. In this technology, shell elements are photo-lithographically fabricated at micron or sub-micron resolution by illuminating with ultraviolet light radiating an ultraviolet light beam onto UV-opaque SU-8 monomer. The technology does not require any steps involving micro-injection molding or micro-stereolithography. Several prototypes have been fabricated to demonstrate the feasibility of this technology.
Part of the book: Lab-on-a-Chip Fabrication and Application