Open access peer-reviewed chapter

Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers

Written By

Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang

Published: January 1st, 2010

DOI: 10.5772/6887

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Written By

Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang

Published: January 1st, 2010