Open access

Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers

Written By

Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang

Published: 01 January 2010

DOI: 10.5772/6887

From the Edited Volume

Solid State Circuits Technologies

Edited by Jacobus W. Swart

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Written By

Friedel Gerfers, Peter M. Kohlstadt, Eyal Ginsburg, Ming Yuan He, Dean Samara-Rubio, Yiannos Manoli and Li-PengWang

Published: 01 January 2010