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Stress Measurements in Si and SiGe by Liquid-Immersion Raman Spectroscopy

Written By

Daisuke Kosemura, Motohiro Tomita, Koji Usuda and Atsushi Ogura

Submitted: November 22nd, 2011 Published: August 29th, 2012

DOI: 10.5772/47831

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Written By

Daisuke Kosemura, Motohiro Tomita, Koji Usuda and Atsushi Ogura

Submitted: November 22nd, 2011 Published: August 29th, 2012