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Optical Interference Signal Processing in Precision Dimension Measurement

Written By

Haijiang Hu, Fengdeng Zhang, Juju Hu and Yinghua Ji

Submitted: 30 May 2011 Published: 25 July 2012

DOI: 10.5772/50529

From the Edited Volume

Automation

Edited by Florian Kongoli

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Written By

Haijiang Hu, Fengdeng Zhang, Juju Hu and Yinghua Ji

Submitted: 30 May 2011 Published: 25 July 2012