Open access

Plasma-Chemical Kinetics of Film Deposition in Argon-Methane and Argon-Acetylene Mixtures Under Atmospheric Pressure Conditions

Written By

Ramasamy Pothiraja, Nikita Bibinov and Peter Awakowicz

Submitted: May 26th, 2011 Published: February 29th, 2012

DOI: 10.5772/36779

Chapter metrics overview

3,344 Chapter Downloads

View Full Metrics

Written By

Ramasamy Pothiraja, Nikita Bibinov and Peter Awakowicz

Submitted: May 26th, 2011 Published: February 29th, 2012