Open access peer-reviewed chapter

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Written By

Lukáš Válek and Jan Šik

Submitted: March 11th, 2011 Reviewed: August 24th, 2011 Published: January 13th, 2012

DOI: 10.5772/29816

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Written By

Lukáš Válek and Jan Šik

Submitted: March 11th, 2011 Reviewed: August 24th, 2011 Published: January 13th, 2012