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Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

Written By

Lukáš Válek and Jan Šik

Submitted: 11 March 2011 Published: 13 January 2012

DOI: 10.5772/29816

From the Edited Volume

Modern Aspects of Bulk Crystal and Thin Film Preparation

Edited by Nikolai Kolesnikov and Elena Borisenko

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Written By

Lukáš Válek and Jan Šik

Submitted: 11 March 2011 Published: 13 January 2012