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Two and Three Dimensional Extreme Ultraviolet Holographic Imaging with a Nanometer Spatial Resolution

Written By

P. W. Wachulak and M. C. Marconi

Submitted: 23 October 2010 Published: 09 November 2011

DOI: 10.5772/17895

From the Edited Volume

Advanced Holography - Metrology and Imaging

Edited by Izabela Naydenova

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Written By

P. W. Wachulak and M. C. Marconi

Submitted: 23 October 2010 Published: 09 November 2011