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Producing Poly-Silicon from Silane in a Fluidized Bed Reactor

Written By

B. Erik Ydstie and Juan Du

Submitted: November 29th, 2010 Published: November 2nd, 2011

DOI: 10.5772/23723

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Written By

B. Erik Ydstie and Juan Du

Submitted: November 29th, 2010 Published: November 2nd, 2011