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Introducing Ohmic Contacts into Silicon Carbide Technology

Written By

Zhongchang Wang, Susumu Tsukimoto, Mitsuhiro Saito and Yuichi Ikuhara

Submitted: 09 November 2010 Published: 10 October 2011

DOI: 10.5772/20481

From the Edited Volume

Silicon Carbide - Materials, Processing and Applications in Electronic Devices

Edited by Moumita Mukherjee

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Written By

Zhongchang Wang, Susumu Tsukimoto, Mitsuhiro Saito and Yuichi Ikuhara

Submitted: 09 November 2010 Published: 10 October 2011