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Measurement Uncertainty of White-Light Interferometry on Optically Rough Surfaces

Written By

Pavel Pavlíček

Submitted: December 9th, 2010 Published: September 26th, 2011

DOI: 10.5772/24642

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Written By

Pavel Pavlíček

Submitted: December 9th, 2010 Published: September 26th, 2011