Open access peer-reviewed chapter

Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry

Written By

Lukas W. Snyman

Submitted: October 29th, 2010 Reviewed: May 24th, 2011 Published: October 5th, 2011

DOI: 10.5772/18810

Chapter metrics overview

3,035 Chapter Downloads

View Full Metrics

Written By

Lukas W. Snyman

Submitted: October 29th, 2010 Reviewed: May 24th, 2011 Published: October 5th, 2011