Open access peer-reviewed chapter

Studies on Electrical and Retention Enhancement Properties of Metal-Ferroelectric-Insulator-Semiconductor with Radical Irradiation Treatments

Written By

Le Van Hai, Takeshi Kanashima and Masanori Okuyama

Submitted: October 19th, 2010 Reviewed: April 18th, 2011 Published: August 24th, 2011

DOI: 10.5772/17106

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Written By

Le Van Hai, Takeshi Kanashima and Masanori Okuyama

Submitted: October 19th, 2010 Reviewed: April 18th, 2011 Published: August 24th, 2011