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MEMS Based on Thin Ferroelectric Layers

Written By

Igor L. Baginsky and Edward G. Kostsov

Submitted: October 21st, 2010 Published: August 23rd, 2011

DOI: 10.5772/17539

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Written By

Igor L. Baginsky and Edward G. Kostsov

Submitted: October 21st, 2010 Published: August 23rd, 2011