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Structural and Electron Transport Properties of Ultrathin SiO2 Films with Embedded Metal Nanoclusters Grown on Si

Written By

Andrei Zenkevich, Yuri Lebedinskii, Oleg Gorshkov, Dmitri Filatov and Dmitri Antonov

Submitted: June 2nd, 2010 Published: March 22nd, 2011

DOI: 10.5772/15016

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Written By

Andrei Zenkevich, Yuri Lebedinskii, Oleg Gorshkov, Dmitri Filatov and Dmitri Antonov

Submitted: June 2nd, 2010 Published: March 22nd, 2011